A. Aidla: search on Z-Library

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1

Atomic layer deposition of Ru films from bis(2,5-dimethylpyrrolyl)ruthenium and oxygen

Kaupo Kukli, Jaan Aarik, Aleks Aidla, Indrek Jõgi, Tõnis Arroval, Jun Lu, Timo Sajavaara, Mikko Laitinen, Alma-Asta Kiisler, Mikko Ritala, Markku Leskelä, John Peck, Jim Natwora, Joan Geary, Ronald Sp

Journal:

Thin Solid Films

Year:

2012

Language:

english

File:

PDF, 1.53 MB

english, 2012

2

Morphology and structure of TiO2 thin films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Teet Uustare, Väino Sammelselg

Journal:

Journal of Crystal Growth

Year:

1995

Language:

english

File:

PDF, 582 KB

english, 1995

3

Chemical resistance of thin film materials based on metal oxides grown by atomic layer deposition

Sammelselg, Väino, Netšipailo, Ivan, Aidla, Aleks, Tarre, Aivar, Aarik, Lauri, Asari, Jelena, Ritslaid, Peeter, Aarik, Jaan

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 711 KB

english, 2013

4

Atomic layer deposition of high-k dielectrics on carbon nanoparticles

Tamm, Aile, Peikolainen, Anna-Liisa, Kozlova, Jekaterina, Mändar, Hugo, Aidla, Aleks, Rammula, Raul, Aarik, Lauri, Roosalu, Kaspar, Lu, Jun, Hultman, Lars, Koel, Mihkel, Kukli, Kaupo, Aarik, Jaan

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 1.11 MB

english, 2013

5

Influence of process parameters on atomic layer deposition of ZrO2 thin films from CpZr(NMe2)3 and H2O

Aarik, Lauri, Alles, Harry, Aidla, Aleks, Kahro, Tauno, Kukli, Kaupo, Niinistö, Jaakko, Mändar, Hugo, Tamm, Aile, Rammula, Raul, Sammelselg, Väino, Aarik, Jaan

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.19 MB

english, 2014

6

Titanium isopropoxide as a precursor for atomic layer deposition: characterization of titanium dioxide growth process

Jaan Aarik, Aleks Aidla, Teet Uustare, Mikko Ritala, Markku Leskelä

Journal:

Applied Surface Science

Year:

2000

Language:

english

File:

PDF, 208 KB

english, 2000

7

Atomic layer deposition of titanium dioxide from TiCl4 and H2O: investigation of growth mechanism

J. Aarik, A. Aidla, H. Mändar, T. Uustare

Journal:

Applied Surface Science

Year:

2001

Language:

english

File:

PDF, 238 KB

english, 2001

8

Properties of tantalum oxide thin films grown by atomic layer deposition

Kaupo Kukli, Jaan Aarik, Aleks Aidla, Oksana Kohan, Teet Uustare, Väino Sammelselg

Journal:

Thin Solid Films

Year:

1995

Language:

english

File:

PDF, 963 KB

english, 1995

9

Relationships between Organizational Culture and Performance in Estonian Schools with Regard to Their Size and Location

Aidla, Anne, Vadi, Maaja

Journal:

Baltic Journal of Economics

Year:

2007

Language:

english

File:

PDF, 882 KB

english, 2007

10

Full-time employed students as university consumers – consequences and triggers of marketisation of higher education

Mägi, Eve, Jaakson, Krista, Aidla, Anne, Kirss, Laura, Reino, Anne

Journal:

European Journal of Higher Education

Year:

2012

Language:

english

File:

PDF, 306 KB

english, 2012

11

ChemInform Abstract: Atomic Layer Deposition of Tantalum Oxide Thin Films from Iodide Precursor.

Kaupo Kukli, Jaan Aarik, Aleks Aidla, Katarina Forsgren, Jonas Sundqvist, Anders Haarsta, Teet Uustare, Hugo Maendar, Alma-Asta Kiisler

Journal:

Year:

2001

File:

PDF, 31 KB

2001

12

Deposition and etching of tantalum oxide films in atomic layer epitaxy process

Jaan Aarik, Aleks Aidla, Kaupo Kukli, Teet Uustare

Journal:

Journal of Crystal Growth

Year:

1994

Language:

english

File:

PDF, 240 KB

english, 1994

13

Precursor properties of calcium β-diketonate in vapor phase atomic layer epitaxy

J. Aarik, A. Aidla, A. Jaek, M. Leskelä, L. Niinistö

Journal:

Applied Surface Science

Year:

1994

Language:

english

File:

PDF, 368 KB

english, 1994

14

In situ characterization of ALE growth by reagent pulse delay times in a flow-type reactor

J. Aarik, A. Aidla, K. Kukli

Journal:

Applied Surface Science

Year:

1994

Language:

english

File:

PDF, 364 KB

english, 1994

15

Influence of carrier gas pressure and flow rate on atomic layer deposition of HfO2 and ZrO2 thin films

Jaan Aarik, Aleks Aidla, Aarne Kasikov, Hugo Mändar, Raul Rammula, Väino Sammelselg

Journal:

Applied Surface Science

Year:

2006

Language:

english

File:

PDF, 277 KB

english, 2006

16

Precursor-dependent structural and electrical characteristics of atomic layer deposited films: Case study on titanium oxide

Indrek Jõgi, Kaupo Kukli, Jaan Aarik, Aleks Aidla, Jun Lu

Journal:

Materials Science in Semiconductor Processing

Year:

2006

Language:

english

File:

PDF, 558 KB

english, 2006

17

Effects of precursors on nucleation in atomic layer deposition of HfO2

Jaan Aarik, Aleks Aidla, Arvo Kikas, Tanel Käämbre, Raul Rammula, Peeter Ritslaid, Teet Uustare, Väino Sammelselg

Journal:

Applied Surface Science

Year:

2004

Language:

english

File:

PDF, 239 KB

english, 2004

18

Transmission electron microscopy studies of HfO2 thin films grown by chloride-based atomic layer deposition

D.R.G. Mitchell, A. Aidla, J. Aarik

Journal:

Applied Surface Science

Year:

2006

Language:

english

File:

PDF, 1.97 MB

english, 2006

19

Structure and morphology of Ru films grown by atomic layer deposition from 1-ethyl-1’-methyl-ruthenocene

Kaupo Kukli, Jaan Aarik, Aleks Aidla, Teet Uustare, Indrek Jõgi, Jun Lu, Massimo Tallarida, Marianna Kemell, Alma-Asta Kiisler, Mikko Ritala, Markku Leskelä

Journal:

Journal of Crystal Growth

Year:

2010

Language:

english

File:

PDF, 1.16 MB

english, 2010

20

Atomic layer deposition of high capacitance density Ta2O5–ZrO2 based dielectrics for metal–insulator–metal structures

Indrek Jõgi, Kaupo Kukli, Mikko Ritala, Markku Leskelä, Jaan Aarik, Aleks Aidla, Jun Lu

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 551 KB

english, 2010

21

Engineering structure and properties of hafnium oxide films by atomic layer deposition temperature

Kaupo Kukli, Jaan Aarik, Teet Uustare, Jun Lu, Mikko Ritala, Aleks Aidla, Lembit Pung, Anders Hårsta, Markku Leskelä, Arvo Kikas, Väino Sammelselg

Journal:

Thin Solid Films

Year:

2005

Language:

english

File:

PDF, 604 KB

english, 2005

22

Influence of TiO2 incorporation in HfO2 and Al2O3 based capacitor dielectrics

Kaupo Kukli, Mikko Ritala, Markku Leskelä, Jonas Sundqvist, Lars Oberbeck, Johannes Heitmann, Uwe Schröder, Jaan Aarik, Aleks Aidla

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 1.03 MB

english, 2007

23

Nanostructured solar cell by spray pyrolysis: Effect of titania barrier layer on the cell performance

I. Oja Acik, A. Katerski, A. Mere, J. Aarik, A. Aidla, T. Dedova, M. Krunks

Journal:

Thin Solid Films

Year:

2009

Language:

english

File:

PDF, 377 KB

english, 2009

24

Texture development in nanocrystalline hafnium dioxide thin films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Hugo Mändar, Väino Sammelselg, Teet Uustare

Journal:

Journal of Crystal Growth

Year:

2000

Language:

english

File:

PDF, 302 KB

english, 2000

25

Anomalous effect of temperature on atomic layer deposition of titanium dioxide

Jaan Aarik, Aleks Aidla, Hugo Mändar, Väino Sammelselg

Journal:

Journal of Crystal Growth

Year:

2000

Language:

english

File:

PDF, 332 KB

english, 2000

26

Atomic layer deposition of zirconium oxide from zirconium tetraiodide, water and hydrogen peroxide

Kaupo Kukli, Katarina Forsgren, Jaan Aarik, Teet Uustare, Aleks Aidla, Antti Niskanen, Mikko Ritala, Markku Leskelä, Anders Hårsta

Journal:

Journal of Crystal Growth

Year:

2001

Language:

english

File:

PDF, 245 KB

english, 2001

27

Atomic layer growth of epitaxial TiO2 thin films from TiCl4 and H2O on α-Al2O3 substrates

Jaan Aarik, Aleks Aidla, Hugo Mändar, Teet Uustare, Mikael Schuisky, Anders Hårsta

Journal:

Journal of Crystal Growth

Year:

2002

Language:

english

File:

PDF, 255 KB

english, 2002

28

Control of thin film structure by reactant pressure in atomic layer deposition of TiO2

Jaan Aarik, Aleks Aidla, Väino Sammelselg, Hele Siimon, Teet Uustare

Journal:

Journal of Crystal Growth

Year:

1996

Language:

english

File:

PDF, 640 KB

english, 1996

29

Ti 2p and O 1s X-ray absorption of TiO2 polymorphs

R. Ruus, A. Kikas, A. Saar, A. Ausmees, E. Nõmmiste, J. Aarik, A. Aidla, T. Uustare, I. Martinson

Journal:

Solid State Communications

Year:

1997

Language:

english

File:

PDF, 585 KB

english, 1997

30

Characterization of titanium dioxide atomic layer growth from titanium ethoxide and water

Jaan Aarik, Aleks Aidla, Väino Sammelselg, Teet Uustare, Mikko Ritala, Markku Leskelä

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 397 KB

english, 2000

31

Growth kinetics and structure formation of ZrO2 thin films in chloride-based atomic layer deposition process

Jaan Aarik, Aleks Aidla, Hugo Mändar, Teet Uustare, Väino Sammelselg

Journal:

Thin Solid Films

Year:

2002

Language:

english

File:

PDF, 381 KB

english, 2002

32

Hafnium tetraiodide and oxygen as precursors for atomic layer deposition of hafnium oxide thin films

Jaan Aarik, Jonas Sundqvist, Aleks Aidla, Jun Lu, Timo Sajavaara, Kaupo Kukli, Anders Hårsta

Journal:

Thin Solid Films

Year:

2002

Language:

english

File:

PDF, 229 KB

english, 2002

33

Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Alma-Asta Kiisler, Teet Uustare, Väino Sammelselg

Journal:

Thin Solid Films

Year:

1997

Language:

english

File:

PDF, 375 KB

english, 1997

34

Influence of substrate temperature on atomic layer growth and properties of HfO2 thin films

J Aarik, A Aidla, A.-A Kiisler, T Uustare, V Sammelselg

Journal:

Thin Solid Films

Year:

1999

Language:

english

File:

PDF, 452 KB

english, 1999

35

New routes to SnO2 heteroepitaxy

A Tarre, A Rosental, A Aidla, J Aarik, J Sundqvist, A Hårsta

Journal:

Year:

2002

Language:

english

File:

PDF, 132 KB

english, 2002

36

Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures

Jaan Aarik, Aleks Aidla, Hugo Mändar, Teet Uustare, Kaupo Kukli, Mikael Schuisky

Journal:

Applied Surface Science

Year:

2001

Language:

english

File:

PDF, 180 KB

english, 2001

37

Atomic layer deposition of TiO2 thin films from TiI4 and H2O

Jaan Aarik, Aleks Aidla, Teet Uustare, Kaupo Kukli, Väino Sammelselg, Mikko Ritala, Markku Leskelä

Journal:

Applied Surface Science

Year:

2002

Language:

english

File:

PDF, 281 KB

english, 2002

38

Mechanisms of suboxide growth and etching in atomic layer deposition of tantalum oxide from TaCl5 and H2O

Jaan Aarik, Kaupo Kukli, Aleks Aidla, Lembit Pung

Journal:

Applied Surface Science

Year:

1996

Language:

english

File:

PDF, 1.01 MB

english, 1996

39

Resonant auger spectra of TiO2 at Ti 2p and O 1s absorption edges

R Ruus, A Saar, J Aark, A Aidla, T Uustare, A Kikas

Journal:

Journal of Electron Spectroscopy and Related Phenomena

Year:

1998

File:

PDF, 502 KB

1998

40

Gas sensing properties of epitaxial SnO2 thin films prepared by atomic layer deposition

A. Rosental, A. Tarre, A. Gerst, J. Sundqvist, A. Hårsta, A. Aidla, J. Aarik, V. Sammelselg, T. Uustare

Journal:

Sensors and Actuators B: Chemical

Year:

2003

Language:

english

File:

PDF, 165 KB

english, 2003

41

Conformity and structure of titanium oxide films grown by atomic layer deposition on silicon substrates

Indrek Jõgi, Martti Pärs, Jaan Aarik, Aleks Aidla, Matti Laan, Jonas Sundqvist, Lars Oberbeck, Johannes Heitmann, Kaupo Kukli

Journal:

Thin Solid Films

Year:

2008

Language:

english

File:

PDF, 1.37 MB

english, 2008

42

Effect of growth conditions on formation of TiO2-II thin films in atomic layer deposition process

Jaan Aarik, Aleks Aidla, Väino Sammelselg, Teet Uustare

Journal:

Journal of Crystal Growth

Year:

1997

Language:

english

File:

PDF, 403 KB

english, 1997

43

Atomic layer deposition of polycrystalline HfO2 films by the HfI4–O2 precursor combination

J. Sundqvist, A. Hårsta, J. Aarik, K. Kukli, A. Aidla

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 130 KB

english, 2003

44

In situ study of atomic layer epitaxy growth of tantalum oxide thin films from Ta(OC2H5)5 and H2O

Kaupo Kukli, Jaan Aarik, Aleks Aidla, Hele Siimon, Mikko Ritala, Markku Leskelä

Journal:

Applied Surface Science

Year:

1997

File:

PDF, 430 KB

1997

45

Atomic layer deposition of HfO2on graphene from HfCl4and H2O

Harry Alles, Jaan Aarik, Aleks Aidla, Aurelien Fay, Jekaterina Kozlova, Ahti Niilisk, Martti Pärs, Mihkel Rähn, Maciej Wiesner, Pertti Hakonen, Väino Sammelselg

Journal:

Central European Journal of Physics

Year:

2011

Language:

english

File:

PDF, 987 KB

english, 2011

46

Atomic layer deposition of ferromagnetic iron oxide films on three-dimensional substrates with tin oxide nanoparticles

Aile Tamm, Mukesh C. Dimri, Jekaterina Kozlova, Aleks Aidla, Tanel Tätte, Tõnis Arroval, Uno Mäeorg, Hugo Mändar, Raivo Stern, Kaupo Kukli

Journal:

Journal of Crystal Growth

Year:

2012

Language:

english

File:

PDF, 673 KB

english, 2012

47

Composition and thickness determination of thin oxide films: comparison of different programs and methods

Sammelselg, V., Aarik, J., Aidla, A., Kasikov, A., Heikinheimo, E., Peussa, M., Niinist, L.

Journal:

Journal of Analytical Atomic Spectrometry

Year:

1999

Language:

english

File:

PDF, 123 KB

english, 1999

48

Ion-induced electron emission from different crystalline phases of ZrO[sub 2]

Matulevich, Y. T., Lee, Min-Suk, Kim, Jae-Hyuk, Choi, Jong-Seo, Kim, Suk-Ki, Suh, Soon-Sung, Zang, Dong-Sik, Aarik, Jaan, Aidla, Aleks, Aints, MaÌrt, Raud, JuÌri, Kirm, Marco

Journal:

Applied Physics Letters

Year:

2006

Language:

english

File:

PDF, 365 KB

english, 2006

49

Atomic Layer Deposition of Thin Films Using O 2 as Oxygen Source

Schuisky, Mikael, Aarik, Jaan, Kukli, Kaupo, Aidla, Aleks, Hårsta, Anders

Journal:

Year:

2001

Language:

english

File:

PDF, 140 KB

english, 2001

50

Real-Time Monitoring in Atomic Layer Deposition of TiO 2 from TiI 4 and H 2 O−H 2 O 2

Kukli, Kaupo, Aidla, Aleks, Aarik, Jaan, Schuisky, Mikael, Hårsta, Anders, Ritala, Mikko, Leskelä, Markku

Journal:

Year:

2000

Language:

english

File:

PDF, 175 KB

english, 2000